JPH0351052B2 - - Google Patents

Info

Publication number
JPH0351052B2
JPH0351052B2 JP56138843A JP13884381A JPH0351052B2 JP H0351052 B2 JPH0351052 B2 JP H0351052B2 JP 56138843 A JP56138843 A JP 56138843A JP 13884381 A JP13884381 A JP 13884381A JP H0351052 B2 JPH0351052 B2 JP H0351052B2
Authority
JP
Japan
Prior art keywords
sample
ionization chamber
primary
mass spectrometer
secondary ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP56138843A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5840761A (ja
Inventor
Hiroshi Hirose
Hideki Kanbara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP56138843A priority Critical patent/JPS5840761A/ja
Publication of JPS5840761A publication Critical patent/JPS5840761A/ja
Publication of JPH0351052B2 publication Critical patent/JPH0351052B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Tubes For Measurement (AREA)
JP56138843A 1981-09-02 1981-09-02 二次イオン質量分析計 Granted JPS5840761A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56138843A JPS5840761A (ja) 1981-09-02 1981-09-02 二次イオン質量分析計

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56138843A JPS5840761A (ja) 1981-09-02 1981-09-02 二次イオン質量分析計

Publications (2)

Publication Number Publication Date
JPS5840761A JPS5840761A (ja) 1983-03-09
JPH0351052B2 true JPH0351052B2 (en]) 1991-08-05

Family

ID=15231482

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56138843A Granted JPS5840761A (ja) 1981-09-02 1981-09-02 二次イオン質量分析計

Country Status (1)

Country Link
JP (1) JPS5840761A (en])

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5996643A (ja) * 1982-11-24 1984-06-04 Hitachi Ltd 質量分析装置
JPH077660B2 (ja) * 1984-05-16 1995-01-30 株式会社日立製作所 大気圧イオン化質量分析計
JP2675064B2 (ja) * 1988-05-09 1997-11-12 日本電子株式会社 質量分析装置用イオン源
WO2015085577A1 (zh) * 2013-12-13 2015-06-18 中国科学院地质与地球物理研究所 使用二次离子质谱仪分析气体样品的系统和方法
JP7073423B2 (ja) * 2020-01-21 2022-05-23 日本電子株式会社 質量分析装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5333689A (en) * 1976-09-10 1978-03-29 Hitachi Ltd Composite ion source for mass spectrometer

Also Published As

Publication number Publication date
JPS5840761A (ja) 1983-03-09

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